13,56 MHz – 100 watt

Application range in plasma systems:

• low pressure plasma
• dielectric heating

RF generator 13.56 MHz, 100 W

• Rated RF power output: 100 Watts
• Frequency: 13.560 MHz ± 100ppm
• Adjustable RF power range :
  0 – 100 Watts, continous
• Generator can be pulsed:
  Min. on-time: 5µs
• Impedance: 50 Ohms
• RF stability: less than 5 %
  (depends on the adjusting device)
• Load missmatch protection (built-in)    against open output and short circuit
• Regulation tolerance load:
  VSWR = 1.2
• Capable of switching power to 100 %    immediately
• Mains input : 88 – 264 VAC / 47 – 63    Hz (when combined with external    power supply )
• Mains power consumption:
  max. 220 Watts
• Remote interface connector intended
  for :
  – RF switch ON/OFF
  – RF power adjustment
  (0…10V = 0…100%)
• RF output: N connector
• Power connector : for external
  power supply
• Weight: approx. 6.5 kg (generator)
  plus 1.0 kg (power supply)