
13,56 MHz – 300 watt
Application range in plasma systems:
- low pressure plasma
- dielectric heating
RF generator 13.56 MHz, 300 W
- Rated RF power output: 300 Watts
- Frequency: 13.560 MHz ± 100ppm
- Adjustable RF power range :
0 – 300 Watts, continous - Generator can be pulsed:
Min. on-time: 5µs - Impedance: 50 Ohms
- RF stability: less than 5 %
(depends on the adjusting device) - Load missmatch protection (built-in) against open output and short circuit
- Regulation tolerance load:
VSWR = 1.2 - Capable of switching power to 100 % immediately
- Mains input : 88 – 264 VAC / 47 – 63 Hz (when combined with external power supply )
- Mains power consumption:
max. 580 Watts - Remote interface connector intended
for :
– RF switch ON/OFF
– RF power adjustment
(0…10V = 0…100%) - RF output: N connector
- Power connector : for external
power supply - Weight: approx. 18 kg (generator)
- 19-inch rack