Automatching

Area of application:
Automatic or manual adjustment of a 13.56 MHz High Frequency (HF) generator to low-pressure plasma.

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AUTOMATCHING FOR 13.56 MHz

  • HF power range: 300 Watt /
    600 Watt
  • Frequency: 13.56 MHz
  • HF operating mode:
    continuous or pulsed
  • Impedance: 50 Ohm
  • Input connector: type N jack connector
  • Output impedance: appropriate for all plasma chambers from Diener electronic with a volume up to 150 liters
  • HF output: type N built-in jack connectors up to 100 Watt or 7/16 built-in jack connectors up to 300 Watt
  • Especially suitable for use with HF generators from Diener electronic or other 300 Watt HF generators for 13.56 MHz that provide a 0-10 volt signal for power forward or return loss.
  • Equipped with a microcontroller system that can function by itself or from a PC
  • Remote control connection for:
    – Default start setting parameters
    – Settings from operating mode manual / auto
    – Acknowledgement of current settings
  • RS232 interface for software updates or remote control
  • Supply voltage: 88-264 VAC / 47-63    Hz
  • Power input: Max. 65 Watt
  • Power supply: IEC
  • Weight: approx. 20 kg
  • Size: 19 inch drawer; 3HE