Automatchning

Area of application:
Automatic or manual adjustment of a 13.56 MHz High Frequency (HF) generator to low-pressure plasma.

AUTOMATCHING FOR 13.56 MHz

HF power range: 300 Watt / 600 Watt Frequency: 13.56 MHz HF operating mode: continuous or pulsed Impedance: 50 Ohm Input connector: type N jack connector Output impedance: appropriate for all plasma chambers from Diener electronic with a volume up to 150 liters HF output: type N built-in jack connectors up to 100 Watt or 7/16 built-in jack connectors up to 300 Watt Especially suitable for use with HF generators from Diener electronic or other 300 Watt HF generators for 13.56 MHz that provide a 0-10 volt signal for power forward or return loss. Equipped with a microcontroller system that can function by itself or from a PC Remote control connection for: – Default start setting parameters – Settings from operating mode manual / auto – Acknowledgement of current settings RS232 interface for software updates or remote control Supply voltage: 88-264 VAC / 47-63    Hz Power input: Max. 65 Watt Power supply: IEC Weight: approx. 20 kg Size: 19 inch drawer; 3HE