Atto- low-cost
10,5 litres laboratory low cost plasma cleaner ATTO with manual, PC and PCCE control is mainly used for:
- small scale production
- analysis (SEM, TEM)
- medical technology
- sterilisation
- research and development
- archaeology
- textile treatment
- semiconductor technology
- plastic technology
Technical Data:
Plasma cleaner Atto
with manual control
switchgear cabinet:
W 425 mm, H 275 mm, D 450 mm
chamber:
glass, Ø 211 mm, L 300 mm
chamber volume:
approx. 10,5 litres
gas supply:
2 gas channels through needle valve
generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching
vacuum pump:
suction power: 2m³/h
tray:
1 pc. tray
control:
manual, process time by timer
Technical Data:
Plasma cleaner Atto
with external PC control (Windows XP)
switchgear cabinet:
W 525 mm, H 275 mm, D 450 mm
chamber:
glass, Ø 211 mm, L 300 mm
chamber volume:
approx. 10,5 litres
gas supply:
2 gas channels via MFC
generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching
vacuum pump:
suction power: 2m³/h
tray:
1 pc. tray
control:
manual, process time by timer
Technical Data:
Plasma cleaner Atto
with built-in PC control (Windows XP)
switchgear cabinet:
W 525 mm, H 275 mm, D 450 mm
chamber:
glass, Ø 211 mm, L 300 mm
chamber volume:
approx. 10,5 litres
gas supply:
2 gas channels via MFC
generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching
vacuum pump:
suction power: 2m³/h
tray:
1 pc. tray
control:
manual, process time by timer
Technical Data:
Plasma cleaner Atto
with built-in PCCE control (Windows CE)
switchgear cabinet:
W 525 mm, H 275 mm, D 450 mm
chamber:
glass, Ø 211 mm, L 300 mm
chamber volume:
approx. 10,5 litres
gas supply:
2 gas channels via MFC
generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching
vacuum pump:
suction power: 2m³/h
tray:
1 pc. tray
control:
manual, process time by timer
