Atto- low-cost

10,5 litres laboratory low cost plasma cleaner ATTO with manual, PC and PCCE control is mainly used for:

  • small scale production
  • analysis (SEM, TEM)
  • medical technology
  • sterilisation
  • research and development
  • archaeology
  • textile treatment
  • semiconductor technology
  • plastic technology

Technical Data:
Plasma cleaner Atto

with manual control

switchgear cabinet:
W 425 mm, H 275 mm, D 450 mm

chamber:
glass, Ø 211 mm, L 300 mm

chamber volume:
approx. 10,5 litres

gas supply:
2 gas channels through needle valve

generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching

vacuum pump:
suction power: 2m³/h

tray:
1 pc. tray

control:
manual, process time by timer


Technical Data:
Plasma cleaner Atto

with external PC control (Windows XP)

switchgear cabinet:
W 525 mm, H 275 mm, D 450 mm
chamber:
glass, Ø 211 mm, L 300 mm
chamber volume:
approx. 10,5 litres
gas supply:
2 gas channels via MFC
generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching
vacuum pump:
suction power: 2m³/h
tray:

1 pc. tray
control:
manual, process time by timer


Technical Data:
Plasma cleaner Atto

with built-in PC control (Windows XP)

switchgear cabinet:
W 525 mm, H 275 mm, D 450 mm
chamber:
glass, Ø 211 mm, L 300 mm
chamber volume:
approx. 10,5 litres
gas supply:
2 gas channels via MFC
generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching
vacuum pump:
suction power: 2m³/h
tray:

1 pc. tray
control:
manual, process time by timer


Technical Data:
Plasma cleaner Atto

with built-in PCCE control (Windows CE)

switchgear cabinet:
W 525 mm, H 275 mm, D 450 mm
chamber:
glass, Ø 211 mm, L 300 mm
chamber volume:
approx. 10,5 litres
gas supply:
2 gas channels via MFC
generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching
vacuum pump:
suction power: 2m³/h
tray:

1 pc. tray
control:
manual, process time by timer

 

logo

PDF

Atto