Femto
The FEMTO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.
Basic configuration
- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1,9 – 6 liters
- Power supply: 230 V AC for table top systems or
- 400 V AC / 3 phases for stand alone systems
Gas supply
- Needle valve
- Mass-Flow-Controller (MFCs)
Vacuum chambers
– Stainless steel
round with cover
(approx. Ø 100 mm, L 278 mm oder L 600 mm) or
rectangular with hinged door
(approx. W 103 x H 103 x D 285 mm)
– Aluminium
round with cover or with hinged door
(approx. Ø 95 mm, L 280 mm or L 600 mm)
– Quartzglass (UHP)
round with cover or with hinged door
(approx. Ø 95 mm, L 280 mm or L 600 mm)
– Borosilicate glass (UHP)
round with cover or with hinged door
(approx. Ø 95 mm, L 280 mm or L 600 mm)
Loading with
Tray (option: water-cooled), quartz glass boat,
rotary drum for powder, rotary drum for bulk materials,
flat tray Aluminium, flat tray stainless steel,
flat tray borosilicate glass, flat tray quartz glass
Electrodes
– One or multi level electrode
– RIE – electrode
Control
– Semi automatic
– PCCE-Control (Microsoft Windows CE)
– PC-Control (Microsoft Windows XPE)
Timer
– Digital
Generator
Frequencies:
40 kHz: Power 0 – 100 W; 0 – 1000 W
13.56 MHz: Power 0 – 50 W; 0 – 300 W
2.45 GHz: Power 0 – 100 W; 0 – 300 W
All generators are continuously adjustable from 0 – 100%
Vacuum pump
– in different sizes from different manufacturers
(As required with active carbon filter)
More options
Spare parts sets, pressure gauge, corrosive gas version, gasbottle, pressure reducer, faraday box, polymerization equipment , test ink set, oxygen-generator, slow ventilation of the vacuum chamber, slow pump down of the vacuum chamber, maintenance / service, documentation in national language, installation on site.