Nano
The NANO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.
Basic configuration
– The outer body varies depending on the components / options
– Chamber volume: depending on the version 18 – 36 liters
– Power supply: 230 V AC for table top systems or
400 V AC/ 3 phases for stand alone systems
Gas supply
– Needle valve
– Mass-Flow-Controller (MFCs)
Vacuum chambers
– Stainless steel
round with cover
(approx. Ø 267 mm, L 420mm or L 600 mm) or
rectangular with hinged door
(approx. W 240 x H 240 x D 420 mm or 600 mm)
– Aluminium
round with cover or with hinged door
(approx. Ø 240 mm, L 400 mm or L 600 mm)
– Quartzglass (UHP)
round with cover or with hinged door
(approx. Ø 240 mm, L 400 mm or L 600 mm)
– Borosilicate glass (UHP)
round with cover or with hinged door
(approx. Ø 240 mm, L 400 mm or L 600 mm)
Loading with
Tray (option: water-cooled), quartz glass boat,
rotary drum for powder, rotary drum for bulk materials, flat tray Aluminium,
flat tray stainless steel, flat tray borosilicate glass,
flat tray quartz glass
Electrodes
– One or multi level electrode
– RIE – electrode
Control
– Semi automatic
– PCCE-Control (Microsoft Windows CE)
– PC-Control (Microsoft Windows XPE)
Pressure measurement
– Pirani sensor
– Baratron (for the corrosive gas version)
Timer
– Digital
Generator
Frequencies:
13.56 MHz: Power 0 – 100 W; 0 – 300 W
2.45 GHz: Power 0 – 600 W
All generators are continuously adjustable from 0 – 100%
Vacuum pump
– in different sizes from different manufacturers
(As required with active carbon filter)
More options
Spare parts sets, pressure gauge, corrosive gas version, gasbottle, pressure reducer, faraday box, polymerization equipment , test ink set, oxygen-generator, slow ventilation of the vacuum chamber, slow pump down of the vacuum chamber, maintenance / service, documentation in national language, installation on site.
