Nano

The NANO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.


Basic configuration

– The outer body varies depending on the components / options
Chamber volume: depending on the version 18 – 36 liters
– Power supply: 230 V AC for table top systems or
400 V AC/ 3 phases for stand alone systems


Gas supply

– Needle valve
– Mass-Flow-Controller (MFCs)


Vacuum chambers

Stainless steel
round with cover
(approx. Ø 267 mm, L 420mm or L 600 mm) or
rectangular with hinged door
(approx. W 240 x H 240 x D 420 mm or 600 mm)

Aluminium
round with cover or with hinged door
(approx. Ø 240 mm, L 400 mm or L 600 mm)

Quartzglass (UHP)
round with cover or with hinged door
(approx. Ø 240 mm, L 400 mm or L 600 mm)

Borosilicate glass (UHP)
round with cover or with hinged door
(approx. Ø 240 mm, L 400 mm or L 600 mm)


Loading with

Tray (option: water-cooled), quartz glass boat,
rotary drum for powder, rotary drum for bulk materials, flat tray Aluminium,
flat tray stainless steel, flat tray borosilicate glass,
flat tray quartz glass


Electrodes

– One or multi level electrode
– RIE – electrode


Control

– Semi automatic
– PCCE-Control (Microsoft Windows CE)
– PC-Control (Microsoft Windows XPE)


Pressure measurement

– Pirani sensor
– Baratron (for the corrosive gas version)


Timer

– Digital


Generator

Frequencies:

40 kHz: Power 0 – 300 W; 0 – 1000 W
13.56 MHz: Power 0 – 100 W; 0 – 300 W
2.45 GHz: Power 0 – 600 W

All generators are continuously adjustable from 0 – 100%


Vacuum pump

– in different sizes from different manufacturers
(As required with active carbon filter)


More options

Spare parts sets, pressure gauge, corrosive gas version, gasbottle, pressure reducer, faraday box, polymerization equipment , test ink set, oxygen-generator, slow ventilation of the vacuum chamber, slow pump down of the vacuum chamber, maintenance / service, documentation in national language, installation on site.

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