Pico

The PICO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

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Basic configuration

– The outer body varies depending on the components / options
– Chamber volume: depending on the version 4 – 15 liters
– Power supply: 230 V AC for table top systems or
400 V AC / 3 phases forstand alone systems

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Gas supply

– Needle valve
– Mass-Flow-Controller (MFCs)

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Vacuum chambers

– Stainless steel
round with cover
(approx. Ø 150 mm, L 320mm or L 600 mm) or
rectangular with hinged door
(approx. W 160 x H 160 x D 325 mm or 600 mm)

– Aluminium
round with cover or with hinged door
(approx. Ø 130 mm, L 300 mm or L 600 mm)

– Quartzglass (UHP)
round with cover or with hinged door
(approx. Ø 130 mm, L 300 mm or L 600 mm)

– Borosilicate glass (UHP)
round with cover or with hinged door
(approx. Ø 130 mm, L 300 mm or L 600 mm)

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Loading with

Tray (option: water-cooled), quartz glass boat,
rotary drum for powder, rotary drum for bulk materials,
flat tray Aluminium, flat tray stainless steel,
flat tray borosilicate glass, flat tray quartz glass

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Electrodes

– One or multi level electrode
– RIE – electrode

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Control

– Semi automatic
– PCCE-Control (Microsoft Windows CE)
– PC-Control (Microsoft Windows XPE)

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Pressure measurement

– Pirani sensor
– Baratron (for the corrosive gas version)

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Timer

– Digital

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Generator

Frequencies:
40 kHz: Power 0 – 200 W; 0 – 1000 W
13.56 MHz: Power 0 – 50 W; 0 – 100 W; 0 – 300 W
2.45 GHz: Power 0 – 300 W

All generators are continuously adjustable from 0 – 100%

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Vacuum pump

– in different sizes from different manufacturers
(As required with active carbon filter)

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